Semiconductor
Applications
Infrared technology in the semiconductor sector
In semiconductor production, precision is required in the smallest of spaces. Processes such as rapid thermal processing (RTP) demand extremely rapid temperature changes within just a few seconds – all without compromising on quality, process stability or safety.
To achieve this, reliable and controllable heat sources are essential. DR. FISCHER Europe has been a trusted partner to the industry for many years, offering customized infrared solutions that are precisely tailored to meet these high demands. Our technologies support key production steps with maximum efficiency, enabling smooth, repeatable and high-performance manufacturing processes.
Rapid Thermal Processing (RTP)
In RTP, silicon wafers are heated to over 1,000 °C for a few seconds. Controlled cooling is just as important as rapid heating in order to avoid thermal stresses, dislocations and breakage of the wafer.
Our high-intensity infrared lamps make this possible:
- Extremely fast heating times
- Uniform temperature distribution
- High process stability
Typical areas of application:
- Activation of dopants
- Thermal oxidation
- Metal reflow
- Chemical vapor deposition (CVD)
In addition to RTP technology, our IR systems are used in many other areas of the semiconductor industry:
Semiconductor packaging
Precise heat sources are crucial in the packaging process of microchips – e.g. for soldering or bonding. Our IR solutions ensure reproducible results with high energy efficiency.
Solar cell production
The photovoltaic industry also benefits from our heating solutions, for example in:
- Doping and CVD-processes
- Lamination
- Tempering of solar cells
Other areas of application
Our twin lamps and other IR products are used in various stages of semiconductor production – whenever fast, precise and clean heat is required.
Our customised solutions
Twin lamps
Solariums for horses have many benefits for their recovery and health before and after exercise.
Twin lamps
IR heating for animal farms maintains the temperature at the right level, essential for animal survival.